Invention Grant
- Patent Title: Device for connecting a susceptor to a drive shaft
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Application No.: US16964152Application Date: 2019-01-22
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Publication No.: US11959190B2Publication Date: 2024-04-16
- Inventor: Torsten Werner Bastke , Francisco Ruda Y Witt , Mike Pfisterer
- Applicant: AIXTRON SE
- Applicant Address: DE Herzogenrath
- Assignee: AIXTRON SE
- Current Assignee: AIXTRON SE
- Current Assignee Address: DE Herzogenrath
- Agency: Ascenda Law Group, PC
- Priority: DE 2018100363.1 2018.01.23
- International Application: PCT/EP2019/051433 2019.01.22
- International Announcement: WO2019/145271A 2019.08.01
- Date entered country: 2020-07-22
- Main IPC: H05B6/80
- IPC: H05B6/80 ; C23C16/458 ; C30B25/12 ; H05B3/68

Abstract:
A device is provided to fasten a susceptor of a CVD reactor to a drive shaft, and by the device, the susceptor can be set into rotation. The device includes one or more of a base plate, a support plate, adjusting levers, and a flange element. The drive shaft carries the base plate, to which the support plate, which carries the susceptor, is fastened. The inclination of the support plate relative to the base plate can be adjusted by the adjusting levers. The support plate is connected to the flange element by a screw. A through opening aligned with the screw is closed with a plug.
Public/Granted literature
- US20210032771A1 DEVICE FOR CONNECTING A SUSCEPTOR TO A DRIVE SHAFT Public/Granted day:2021-02-04
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