Invention Grant
- Patent Title: Piston mode lamb wave resonators
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Application No.: US18072994Application Date: 2022-12-01
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Publication No.: US11962283B2Publication Date: 2024-04-16
- Inventor: Jie Zou , Jiansong Liu , Gong Bin Tang , Chih-Ming Lin , Chun Sing Lam
- Applicant: Skyworks Solutions, Inc.
- Applicant Address: US CA Irvine
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US CA Irvine
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/13 ; H03H9/17 ; H03H9/56

Abstract:
Piston mode Lamb wave resonators are disclosed. A piston mode Lamb wave resonator can include a piezoelectric layer, such as an aluminum nitride layer, and an interdigital transducer on the piezoelectric layer. The piston mode Lamb wave resonator has an active region and a border region, in which the border region has a velocity with a lower magnitude than a velocity of the active region. The border region can suppress a transverse mode.
Public/Granted literature
- US20230099342A1 PISTON MODE LAMB WAVE RESONATORS Public/Granted day:2023-03-30
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