Invention Grant
- Patent Title: Methods for forming three-dimensional memory devices with backside source contacts
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Application No.: US17020424Application Date: 2020-09-14
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Publication No.: US11963349B2Publication Date: 2024-04-16
- Inventor: Kun Zhang , Ziqun Hua , Wenxi Zhou , Zhiliang Xia , Zongliang Huo
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Priority: WO TCN2020092499 2020.05.27 WO TCN2020092501 2020.05.27 WO TCN2020092504 2020.05.27 WO TCN2020092506 2020.05.27 WO TCN2020092512 2020.05.27 WO TCN2020092513 2020.05.27
- Main IPC: H10B41/27
- IPC: H10B41/27 ; H10B41/35 ; H10B41/40 ; H10B43/27 ; H10B43/35 ; H10B43/40

Abstract:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A sacrificial layer on a substrate, a first stop layer on the sacrificial layer, an N-type doped semiconductor layer on the first stop layer, and a dielectric stack on the N-type doped semiconductor layer are sequentially formed. A plurality of channel structures each extending vertically through the dielectric stack and the N-type doped semiconductor layer are formed, stopping at the first stop layer. The dielectric stack is replaced with a memory stack, such that each of the plurality of channel structures extends vertically through the memory stack and the N-type doped semiconductor layer. The substrate, the sacrificial layer, and the first stop layer are sequentially removed to expose an end of each of the plurality of channel structures. A conductive layer is formed in contact with the ends of the plurality of channel structures.
Public/Granted literature
- US20210375900A1 METHODS FOR FORMING THREE-DIMENSIONAL MEMORY DEVICES Public/Granted day:2021-12-02
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