Invention Grant
- Patent Title: Semiconductor memory device and method for fabricating the same
-
Application No.: US17218850Application Date: 2021-03-31
-
Publication No.: US11963350B2Publication Date: 2024-04-16
- Inventor: Sang Hyon Kwak
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: WILLIAM PARK & ASSOCIATES LTD.
- Priority: KR 20210002554 2021.01.08
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B41/10 ; H10B41/27 ; H10B41/40 ; H10B43/10 ; H10B43/40

Abstract:
A semiconductor memory device and a method for fabricating the same are provided. The semiconductor memory device includes a plurality of gate stacks separated by a plurality of slit structures, and each of the gate stacks includes: a first stack including three or more first conductive patterns spaced apart from one another at substantially a same level; a second stack formed on the first stack and including second conductive patterns and interlayer dielectric layers alternately stacked; and a plurality of channel structures penetrating the second stack and the first stack.
Public/Granted literature
- US20220223617A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-07-14
Information query