Invention Grant
- Patent Title: Switching device and resistance variable device
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Application No.: US17469778Application Date: 2021-09-08
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Publication No.: US11963459B2Publication Date: 2024-04-16
- Inventor: Hiroshi Takehira , Katsuyoshi Komatsu , Tadaomi Daibou , Hiroki Kawai , Yuichi Ito
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JP 20157380 2020.09.18
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G11C11/16 ; G11C19/08 ; H10N50/10 ; H10N50/80 ; H10N50/85 ; H10B61/00

Abstract:
A switching device according to an embodiment includes a switching layer disposed between a first electrode and a second electrode. The switching layer contains a material containing a first cation element Z, Te, and N. This material contains at least 5 atomic % or more of each of Z, Te, and N, and when an atomic ratio of Te is X, an atomic ratio of N is Y, an atomic ratio of Z is W, a ratio of Z2Te3 to ZN on a straight line connecting a compound of the first cation element Z with tellurium and nitride of the first cation element Z in a ternary phase diagram of Z, Te, and N is A, and a change in an N content from the Z2Te3—ZN line is B, the material has a composition satisfying X=1.2 (1−A) (0.5+B), Y=A (0.5+B), and W=1−X−Y, where −0.06≤B≤0.06 is satisfied when ⅓>A and ¾
Public/Granted literature
- US20220093851A1 SWITCHING DEVICE AND RESISTANCE VARIABLE DEVICE Public/Granted day:2022-03-24
Information query
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