Invention Grant
- Patent Title: Optical sensor and geometry measurement apparatus
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Application No.: US17721858Application Date: 2022-04-15
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Publication No.: US11965733B2Publication Date: 2024-04-23
- Inventor: Takamitsu Watanabe , Kentaro Nemoto , Yoshihiko Sugita
- Applicant: Mitutoyo Corporation
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kawasaki
- Agency: Rankin, Hill & Clark LLP
- Priority: JP 21100044 2021.06.16
- Main IPC: G01B11/24
- IPC: G01B11/24

Abstract:
An optical sensor includes a radiation part that irradiates an object to be measured with laser light, an imaging part that receives laser light reflected by the object to be measured and captures an image of the object to be measured, a first driving part that moves the radiation part in a radiation direction of laser light to the object to be measured, and a second driving part that moves the imaging part in a reflection direction of laser light from the object to be measured and an orthogonal direction to the reflection direction.
Public/Granted literature
- US20220404142A1 OPTICAL SENSOR AND GEOMETRY MEASUREMENT APPARATUS Public/Granted day:2022-12-22
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