- Patent Title: Imprint apparatus, imprint method, and article manufacturing method
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Application No.: US17741827Application Date: 2022-05-11
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Publication No.: US11966157B2Publication Date: 2024-04-23
- Inventor: Kengo Kamei
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: ROSSI, KIMMS & McDOWELL LLP
- Priority: JP 21085582 2021.05.20 JP 22014992 2022.02.02
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F9/00

Abstract:
Imprint apparatus performs, on shot regions of substrate, imprint process for transferring pattern of mold to imprint material arranged on the substrate. The apparatus includes detector for detecting first mark of the substrate and second mark of the mold, and controller configured to control positioning of the detector based on driving amount, held in a storage, by which the detector is to be driven to fit the first mark and the second mark within specific region of field of view of the detector, and correction value held in the storage and used to correct the driving amount. The controller performs alignment between shot region selected from the shot regions and the mold based on output of the detector, and updates the correction value held in the storage based on the output of the detector.
Public/Granted literature
- US20220373880A1 IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2022-11-24
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