Invention Grant
- Patent Title: Grinding apparatus
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Application No.: US17649625Application Date: 2022-02-01
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Publication No.: US11967506B2Publication Date: 2024-04-23
- Inventor: Mato Hattori , Ichiro Yamahata
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: GREER BURNS & CRAIN, LTD.
- Priority: JP 21020558 2021.02.12
- Main IPC: H01L21/304
- IPC: H01L21/304 ; B24B27/00 ; B24B37/04 ; B24B47/22

Abstract:
A grinding apparatus includes a first grinding mechanism, a second grinding mechanism, and a third grinding mechanism for grinding wafers held on respective chuck tables. The first grinding mechanism and the second grinding mechanism are positioned with respect to the chuck tables such that a second ground mark produced on a wafer by second grindstones of the second grinding mechanism as it grinds the wafer extends across a first ground mark produced on the wafer by first grindstones of the first grinding mechanism as it grinds the wafer. The second grinding mechanism and the third grinding mechanism are positioned with respect to the chuck tables such that a third ground mark produced on the wafer by third grindstones of the third grinding mechanism as it grinds the wafer extends across the second ground mark produced on the wafer by the second grindstones.
Public/Granted literature
- US20220262641A1 GRINDING APPARATUS Public/Granted day:2022-08-18
Information query
IPC分类: