Invention Grant
- Patent Title: Damper control system and damper control method
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Application No.: US17607999Application Date: 2020-05-29
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Publication No.: US11967508B2Publication Date: 2024-04-23
- Inventor: Akira Imamura , Mitsuru Miyazaki , Junji Kunisawa
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: PEARNE & GORDON LLP
- Priority: JP 19101611 2019.05.30
- International Application: PCT/JP2020/021418 2020.05.29
- International Announcement: WO2020/241848A 2020.12.03
- Date entered country: 2021-11-01
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677

Abstract:
The present invention relates to a damper control system and a damper control method for controlling an opening degree of an exhaust damper connected to an exhaust duct. The damper control system (300) includes an exhaust damper (310), a first pressure sensor (311), and a controller (315) configured to control an opening degree of the exhaust damper (310). The controller (315) is configured to switch the opening degree of the exhaust damper (310) to an opening degree smaller than a full opening on condition that a shutter (217) is opened.
Public/Granted literature
- US20220319874A1 DAMPER CONTROL SYSTEM AND DAMPER CONTROL METHOD Public/Granted day:2022-10-06
Information query
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