Invention Grant
- Patent Title: Segmented power diode structure with improved reverse recovery
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Application No.: US17600812Application Date: 2020-04-01
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Publication No.: US11967638B2Publication Date: 2024-04-23
- Inventor: Tobias Wikstroem , Umamaheswara Vemulapati , Thomas Stiasny
- Applicant: Hitachi Energy Ltd
- Applicant Address: CH Zürich
- Assignee: Hitachi Energy Ltd
- Current Assignee: Hitachi Energy Ltd
- Current Assignee Address: CH Zurich
- Agency: Slater Matsil, LLP
- Priority: EP 166711 2019.04.02
- International Application: PCT/EP2020/059271 2020.04.01
- International Announcement: WO2020/201361A 2020.10.08
- Date entered country: 2021-10-01
- Main IPC: H01L29/74
- IPC: H01L29/74 ; H01L29/66 ; H01L29/745

Abstract:
A power diode comprises a plurality of diode cells (10). Each diode cell (10) comprises a first conductivity type first anode layer (40), a first conductivity type second anode layer (45) having a lower doping concentration than the first anode layer (40) and being separated from an anode electrode layer (20) by the first anode layer (40), a second conductivity type drift layer (50) forming a pn-junction with the second anode layer (45), a second conductivity type cathode layer (60) being in direct contact with the cathode electrode layer (60), and a cathode-side segmentation layer (67) being in direct contact with the cathode electrode layer (30). A material of the cathode-side segmentation layer (67) is a first conductivity type semiconductor, wherein an integrated doping content of the cathode-side, which is integrated along a direction perpendicular to the second main side (102), is below 2·1013 cm−2, or a material of the cathode-side segmentation layer (67) is an insulating material. A horizontal cross-section through each diode cell (10) along a horizontal plane (K1) comprises a first area where the horizontal plane (K1) intersects the second anode layer (45) and a second area where the plane (K1) intersects the drift layer (50).
Public/Granted literature
- US20220181473A1 Segmented Power Diode Structure with Improved Reverse Recovery Public/Granted day:2022-06-09
Information query
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