Invention Grant
- Patent Title: Transversely-excited film bulk acoustic filters with symmetric layout
-
Application No.: US17706154Application Date: 2022-03-28
-
Publication No.: US11967942B2Publication Date: 2024-04-23
- Inventor: Ventsislav Yantchev
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD
- Current Assignee: MURATA MANUFACTURING CO., LTD
- Current Assignee Address: JP Nagaokakyo
- Agency: ArentFox Schiff LLP
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/02 ; H03H9/54 ; H03H9/13

Abstract:
There are disclosed acoustic resonators and radio frequency filter devices. A back surface of a single-crystal piezoelectric plate is attached to a surface of a substrate except for portions of the piezoelectric plate forming a plurality of diaphragms, each of which spans a respective cavity in the substrate. A conductor pattern is formed on the front surface, the conductor pattern including interdigital transducers (IDTs) of one or more pairs of sub-resonators, each pair consisting of two sub-resonators. The IDT of each sub-resonator includes interleaved fingers disposed on a respective diaphragm. The piezoelectric plate and the IDTs are configured such that respective radio frequency signals applied to each IDT excite respective shear primary acoustic modes in the respective diaphragms. The two sub-resonators of each pair of sub-resonators are positioned symmetrically about a central axis.
Public/Granted literature
- US20230131329A1 TRANSVERSELY-EXCITED FILM BULK ACOUSTIC FILTERS WITH SYMMETRIC LAYOUT Public/Granted day:2023-04-27
Information query
IPC分类: