Invention Grant
- Patent Title: Transversly-excited film bulk acoustic resonators and filters
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Application No.: US17109812Application Date: 2020-12-02
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Publication No.: US11967945B2Publication Date: 2024-04-23
- Inventor: Viktor Plesski , Soumya Yandrapalli , Robert B. Hammond , Bryant Garcia , Patrick Turner , Jesson John , Ventsislav Yantchev
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo
- Agency: ARENTFOX SCHIFF LLP
- Main IPC: H03H9/56
- IPC: H03H9/56 ; H03H3/02 ; H03H9/02 ; H03H9/13 ; H03H9/17 ; H10N30/87

Abstract:
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a single-crystal piezoelectric plate. A back surface of a supported portion of the piezoelectric plate is attached to a surface of the substrate. A portion of the piezoelectric plate forms a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on a front surface of the piezoelectric plate. The IDT includes first and second busbars, and interleaved fingers extending alternately from the first and second busbars. Overlapping portions of the interleaved fingers are disposed on the diaphragm. At least portions of both the first and second busbars are disposed on the supported portion of the piezoelectric plate.
Public/Granted literature
- US20210091749A1 TRANSVERSLY-EXCITED FILM BULK ACOUSTIC RESONATORS AND FILTERS Public/Granted day:2021-03-25
Information query
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