A display substrate, a manufacturing method thereof and a display apparatus are disclosed. The display substrate includes a silicon base substrate and a color film layer disposed on the silicon base substrate. A plurality of metal traces for connecting a display area and a cathode ring with a bonding area respectively are contained in the silicon base substrate. The color film layer includes a first align mark, and the first align mark has a hollowed-out structure. A projection of the first align mark on the silicon base substrate and projections of the metal traces on the silicon base substrate include overlapping areas.