• Patent Title: Sputtering target including carbon-doped GST and method for fabricating electronic device using the same
  • Application No.: US17324833
    Application Date: 2021-05-19
  • Publication No.: US11968912B2
    Publication Date: 2024-04-23
  • Inventor: Jun Ku Ahn
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Icheon
  • Assignee: SK hynix Inc.
  • Current Assignee: SK hynix Inc.
  • Current Assignee Address: KR Icheon
  • Priority: KR 20200176290 2020.12.16
  • Main IPC: H10B63/00
  • IPC: H10B63/00 C23C14/06 C23C14/34 H10N70/00
Sputtering target including carbon-doped GST and method for fabricating electronic device using the same
Abstract:
A sputtering target and a method for fabricating an electronic device using the same are provided. A sputtering target may include a carbon-doped GeSbTe alloy, wherein, for the carbon-doped GeSbTe alloy, an average grain diameter of a GeSbTe alloy after sintering is in a range of 0.5 μm to 5 μm, and a first ratio of an average grain diameter of carbon after the sintering is Y (μm) to the average grain diameter of the GeSbTe alloy after the sintering may be in a range of greater than 0.5 and equal to or less than 1.5. Alternatively, for the carbon-doped GeSbTe alloy, a condition of Y=X×(Z/100) may be satisfied, where an average grain diameter of a GeSbTe alloy after sintering is X (μm), an average grain diameter of carbon after the sintering is Y (μm), and a content of carbon is Z (at %).
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