Invention Grant
- Patent Title: Sputtering target including carbon-doped GST and method for fabricating electronic device using the same
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Application No.: US17324833Application Date: 2021-05-19
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Publication No.: US11968912B2Publication Date: 2024-04-23
- Inventor: Jun Ku Ahn
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon
- Priority: KR 20200176290 2020.12.16
- Main IPC: H10B63/00
- IPC: H10B63/00 ; C23C14/06 ; C23C14/34 ; H10N70/00

Abstract:
A sputtering target and a method for fabricating an electronic device using the same are provided. A sputtering target may include a carbon-doped GeSbTe alloy, wherein, for the carbon-doped GeSbTe alloy, an average grain diameter of a GeSbTe alloy after sintering is in a range of 0.5 μm to 5 μm, and a first ratio of an average grain diameter of carbon after the sintering is Y (μm) to the average grain diameter of the GeSbTe alloy after the sintering may be in a range of greater than 0.5 and equal to or less than 1.5. Alternatively, for the carbon-doped GeSbTe alloy, a condition of Y=X×(Z/100) may be satisfied, where an average grain diameter of a GeSbTe alloy after sintering is X (μm), an average grain diameter of carbon after the sintering is Y (μm), and a content of carbon is Z (at %).
Public/Granted literature
- US20220190241A1 SPUTTERING TARGET INCLUDING CARBON-DOPED GST AND METHOD FOR FABRICATING ELECTRONIC DEVICE USING THE SAME Public/Granted day:2022-06-16
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