Invention Grant
- Patent Title: MEMS resonator
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Application No.: US18340815Application Date: 2023-06-23
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Publication No.: US11975965B2Publication Date: 2024-05-07
- Inventor: Charles I. Grosjean , Nicholas Miller , Paul M. Hagelin , Ginel C. Hill , Joseph C. Doll
- Applicant: SiTime Corporation
- Applicant Address: US CA Santa Clara
- Assignee: SiTime Corporation
- Current Assignee: SiTime Corporation
- Current Assignee Address: US CA Sunnyvale
- The original application number of the division: US15676890 2017.08.14
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H03H3/007 ; H03H9/10 ; H10N30/05 ; H10N39/00
Abstract:
Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
Public/Granted literature
- US20230416081A1 MEMS RESONATOR Public/Granted day:2023-12-28
Information query
