Invention Grant
- Patent Title: Deposition mask for OLED pixel deposition
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Application No.: US17554071Application Date: 2021-12-17
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Publication No.: US11976349B2Publication Date: 2024-05-07
- Inventor: Nam Ho Kim
- Applicant: LG INNOTEK CO., LTD.
- Applicant Address: KR Seoul
- Assignee: LG INNOTEK CO., LTD.
- Current Assignee: LG INNOTEK CO., LTD.
- Current Assignee Address: KR Seoul
- Agency: KED & ASSOCIATES, LLP
- Priority: KR 20200180951 2020.12.22
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H10K71/16

Abstract:
A deposition mask according to an embodiment includes a metal plate including a first surface and a second surface opposite to the first surface wherein the metal plate includes iron (Fe) and nickel (Ni), a thickness of the metal plate is 15 μm to 30 μm, and the metal plate includes a first surface layer having a depth of 20% or less of the thickness of the metal plate from the first surface and a second surface layer having a depth of 20% or less of the thickness of the metal plate from the second surface, wherein when diffraction intensity with respect to a (111) crystal plane of the first surface layer is defined as I (111), diffraction intensity with respect to a (200) crystal plane is defined as I (200), and diffraction intensity with respect to a (220) crystal plane is defined as I (220), a ratio of diffraction intensity of I (220) is defined by Equation 1 below,
A=I(220)/(I(200)+I(220)+I(111)) [Equation]
a ratio of diffraction intensity of I (200) is defined by Equation 2 below,
B=I(200)/(I(200)+I(220)+I(111)) [Equation 2]
a ratio of diffraction intensity of I (111) is defined by Equation 3 below,
C=I(111)/(I(200)+I(220)+I(111)) [Equation 3]
a value of the A is greater than a value of the B and a value of the C, the value of the B is greater than the value of the C, and when a ratio of the B to the A (B/A) is defined as D, a value of the D is 0.5 to less than 1.
A=I(220)/(I(200)+I(220)+I(111)) [Equation]
a ratio of diffraction intensity of I (200) is defined by Equation 2 below,
B=I(200)/(I(200)+I(220)+I(111)) [Equation 2]
a ratio of diffraction intensity of I (111) is defined by Equation 3 below,
C=I(111)/(I(200)+I(220)+I(111)) [Equation 3]
a value of the A is greater than a value of the B and a value of the C, the value of the B is greater than the value of the C, and when a ratio of the B to the A (B/A) is defined as D, a value of the D is 0.5 to less than 1.
Public/Granted literature
- US20220195579A1 DEPOSITION MASK FOR OLED PIXEL DEPOSITION Public/Granted day:2022-06-23
Information query
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