Invention Grant
- Patent Title: Sensor and its manufacturing method
-
Application No.: US16832161Application Date: 2020-03-27
-
Publication No.: US11976989B2Publication Date: 2024-05-07
- Inventor: Marko Pudas , Jani Kivioja , Niku Oksala
- Applicant: Picosun Oy
- Applicant Address: FI Espoo
- Assignee: PICOSUN OY
- Current Assignee: PICOSUN OY
- Current Assignee Address: FI Espoo
- Agency: Espatent Oy
- Main IPC: G01L1/22
- IPC: G01L1/22 ; A61B5/00 ; A61B17/84 ; A61B17/86 ; H05K3/46 ; A61B17/00
Abstract:
A strain sensor that includes a first atomic layer deposition layer, a flexible molecular layer deposition layer on top of the first atomic layer deposition layer, and a second atomic layer deposition layer on top of the molecular layer deposition layer.
Public/Granted literature
- US20200309620A1 SENSOR AND ITS MANUFACTURING METHOD Public/Granted day:2020-10-01
Information query
