- Patent Title: Micromechanical component for a capacitive pressure sensor device
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Application No.: US17282736Application Date: 2019-12-18
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Publication No.: US11976996B2Publication Date: 2024-05-07
- Inventor: Thomas Friedrich , Christoph Hermes , Hans Artmann , Heribert Weber , Peter Schmollngruber , Volkmar Senz
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: NORTON ROSE FULBRIGHT US LLP
- Agent Gerard A. Messina
- Priority: DE 2018222719.5 2018.12.21
- International Application: PCT/EP2019/085943 2019.12.18
- International Announcement: WO2020/127477A 2020.06.25
- Date entered country: 2021-04-02
- Main IPC: B81B7/02
- IPC: B81B7/02 ; G01L7/08 ; G01L9/00

Abstract:
A micromechanical component for a capacitive pressure sensor device, including a diaphragm that is stretched with the aid of a frame structure in such a way that a cantilevered area of the diaphragm spans a framed partial surface, and including a reinforcement structure that is formed at the cantilevered area. A first spatial direction oriented in parallel to the framed partial surface is definable in which the cantilevered area has a minimal extension, and a second spatial direction oriented in parallel to the framed partial surface and oriented perpendicularly with respect to the first spatial direction is definable in which the cantilevered area has a greater extension. The reinforcement structure is present at a first distance from the frame structure in the first spatial direction, and at a second distance in the second spatial direction, the second distance being greater than the first distance.
Public/Granted literature
- US20220003621A1 MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE Public/Granted day:2022-01-06
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