Invention Grant
- Patent Title: Optical inspection method, optical inspection device, and non-transitory computer-readable storage medium storing optical inspection program
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Application No.: US17462639Application Date: 2021-08-31
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Publication No.: US11977022B2Publication Date: 2024-05-07
- Inventor: Hiroshi Ohno
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP 21044567 2021.03.18
- Main IPC: G01N21/31
- IPC: G01N21/31 ; H01L27/146

Abstract:
According to one embodiment, an optical inspection method acquires, for an image point imaged through separating light from an object point into beams of light in at least two different and independent wavelength ranges, a hue vector having, as independent axes, intensities of the beams of light in the at least two different and independent wavelength ranges. The method then acquires, from the hue vector, information regarding a ray direction of the light from the object point.
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Information query
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