Invention Grant
- Patent Title: Polarized light irradiation device and exposure method for irradiation target object
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Application No.: US17674857Application Date: 2022-02-18
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Publication No.: US11977299B2Publication Date: 2024-05-07
- Inventor: Akira Yamamoto , Makoto Kamo
- Applicant: FUJIFILM CORPORATION
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM CORPORATION
- Current Assignee: FUJIFILM CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: SOLARIS Intellectual Property Group, PLLC
- Priority: JP 19179606 2019.09.30
- Main IPC: G02F1/1337
- IPC: G02F1/1337

Abstract:
A polarized light irradiation device of the present disclosure has: a light source unit which continuously emits polarized light; a light shaping unit which shapes the polarized light emitted from the light source unit into a preset shape to irradiate an irradiation target object with the shaped polarized light; a transport mechanism which transports the irradiation target object relative to the light source unit; and an interlocking mechanism which periodically and continuously changes a direction of linearly polarized light applied to the irradiation target object or an azimuthal angle of elliptically polarized light applied to the irradiation target object according to an amount of transport of the irradiation target object relative to the light source unit by the transport mechanism.
Public/Granted literature
- US20220171241A1 POLARIZED LIGHT IRRADIATION DEVICE AND EXPOSURE METHOD FOR IRRADIATION TARGET OBJECT Public/Granted day:2022-06-02
Information query
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