A flexible stamp comprising at least three layers, an upper layer as a texturing layer (203) having a relief area (203B), a strengthening layer (202) and a protective layer (201), characterized in that the strengthening layer (202) has a thermal expansion coefficient of 10 ppm/° C. or lower, a Young's modulus in the range of 10 GPa-200 GPa, a layer thickness of below 300 μm and an area which at least covers the relief area (203B).