Invention Grant
- Patent Title: Apparatus with switches to produce a waveform
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Application No.: US18198790Application Date: 2023-05-17
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Publication No.: US11978611B2Publication Date: 2024-05-07
- Inventor: Daniel Carter , Randy Heckman , Victor Brouk , Daniel J. Hoffman
- Applicant: Advanced Energy Industries, Inc.
- Applicant Address: US CO Denver
- Assignee: Advanced Energy Industries, Inc.
- Current Assignee: Advanced Energy Industries, Inc.
- Current Assignee Address: US CO Denver
- Agency: Neugeboren O'Dowd PC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/34

Abstract:
An apparatus and method to produce a waveform. The apparatus includes a first node, a first power supply coupled to a second node, a first switch that couples the second node to the first node, and responsive to the first switch being closed, a peak voltage is applied at the first node. The apparatus also includes a second switch that couples a third node to the first node, and responsive to the second switch being closed, a voltage step is applied at the first node. In addition, a second power supply is coupled to the first node to produce a ramped voltage at the first node.
Public/Granted literature
- US20230377840A1 APPARATUS WITH SWITCHES TO PRODUCE A WAVEFORM Public/Granted day:2023-11-23
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