Invention Grant
- Patent Title: Transition control in a bias supply
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Application No.: US17901759Application Date: 2022-09-01
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Publication No.: US11978613B2Publication Date: 2024-05-07
- Inventor: Hien Minh Nguyen
- Applicant: Advanced Energy Industries, Inc.
- Applicant Address: US CO Denver
- Assignee: Advanced Energy Industries, Inc.
- Current Assignee: Advanced Energy Industries, Inc.
- Current Assignee Address: US CO Denver
- Agency: Neugeboren O'Dowd PC
- Main IPC: H03K3/017
- IPC: H03K3/017 ; H01J37/32

Abstract:
Bias supplies and bias control methods are disclosed. One method comprises applying an asymmetric periodic voltage waveform and providing a corresponding current waveform at an output node relative to a return node; receiving a signal to change from a current state of the asymmetric periodic voltage waveform to a next state of the asymmetric periodic voltage waveform; and adjusting, during a transition from the current state to the next state, at least one portion of the asymmetric periodic voltage waveform and simultaneously adjusting a fundamental frequency of the asymmetric periodic voltage waveform to settle at the next state.
Public/Granted literature
- US20240079210A1 TRANSITION CONTROL IN A BIAS SUPPLY Public/Granted day:2024-03-07
Information query
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