Invention Grant
- Patent Title: Sputtering apparatus
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Application No.: US17717521Application Date: 2022-04-11
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Publication No.: US11978615B2Publication Date: 2024-05-07
- Inventor: Hyun-Woo Kim , Sangmok Nam , Jaeho Byeon , Jongho Hyun , Nam-Jin Hyung
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: CANTOR COLBURN LLP
- Priority: KR 20210100464 2021.07.30
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/35

Abstract:
A sputtering apparatus includes a back plate supporting a sputtering target, a magnet module disposed under the back plate and including a magnet unit reciprocating in a first direction, a first shielding member attached on a portion of the magnet unit, moving together with the magnet unit, and covering at least a portion of the magnet unit, a protective sheet disposed between the back plate and the magnet module, and a second shielding member disposed between the back plate and the magnet module, and having a fixed position.
Public/Granted literature
- US20230035198A1 SPUTTERING APPARATUS Public/Granted day:2023-02-02
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