Invention Grant
- Patent Title: Substrate transport apparatus
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Application No.: US17654852Application Date: 2022-03-15
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Publication No.: US11978651B2Publication Date: 2024-05-07
- Inventor: Robert T. Caveney
- Applicant: Brooks Automation US, LLC
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation US, LLC
- Current Assignee: Brooks Automation US, LLC
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67

Abstract:
A transport apparatus including a drive section connected to a frame and including a multi-drive shaft spindle, with at least one coaxial shaft spindle, more than one different interchangeable motor module arranged in a stack, each having a motor operably coupled thereto and defining a corresponding independent drive axis, and a can seal disposed between the stator and rotor of each motor module and hermetically sealing the stator and rotor from each other, at least one of the motor modules is selectable for placement in the stack from other different interchangeable motor modules, each having a different predetermined characteristic, independent of placement in the stack, that defines a different predetermined drive characteristic of the corresponding drive axis, independent of shaft spindle location, so that selection of the at least one motor module determines the different predetermined drive characteristic of the corresponding axis different from another of the independent drive axis.
Public/Granted literature
- US20220270903A1 SUBSTRATE TRANSPORT APPARATUS Public/Granted day:2022-08-25
Information query
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