Invention Grant
- Patent Title: Simultaneous self-forming hea barrier and Cu seeding layers for Cu interconnect
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Application No.: US17702619Application Date: 2022-03-23
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Publication No.: US11978702B2Publication Date: 2024-05-07
- Inventor: Yong Zhao , Zhaosheng Meng , Min-Hwa Chi
- Applicant: SiEn (QingDao) Integrated Circuits Co., Ltd.
- Applicant Address: CN Shandong
- Assignee: SiEn (QingDao) Integrated Circuits Co., Ltd.
- Current Assignee: SiEn (QingDao) Integrated Circuits Co., Ltd.
- Current Assignee Address: CN Qingdao
- Agency: Chen Yoshimura LLP
- Priority: CN 2110357114.1 2021.04.01
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/768

Abstract:
A Cu interconnect having a diffusion barrier formed with the self-formed high-entropy alloy a method of preparing the same are provided. A high-entropy alloy and Cu are deposited together. When annealing, a diffusion barrier is formed through segregation of the high-entropy alloy may, toward a bottom and a sidewall of an interconnect via, and a Cu seed layer is formed through segregation of Cu at an outer surface of the diffusion barrier, so as to simultaneously self-form the diffusion barrier formed with the self-formed high-entropy alloy and the Cu seed layer. The Cu interconnect having a diffusion barrier formed with the self-formed high-entropy alloy comprises: a base, the self-formed diffusion barrier formed with the self-formed high-entropy alloy and the Cu seed layer and a Cu electroplating layer electroplating on the Cu seed layer.
Public/Granted literature
- US20220319999A1 SIMULTANEOUS SELF-FORMING HEA BARRIER AND CU SEEDING LAYERS FOR CU INTERCONNECT Public/Granted day:2022-10-06
Information query
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