Charge amplifier, force sensor, and robot
Abstract:
A charge amplifier includes: an input line thorough which an electric charge signal is propagated; an integration circuit including an input terminal coupled to the input line and an output terminal that outputs the voltage signal; a reset switch configured to reset the voltage signal by closing between the input terminal and the output terminal; a leakage current correction circuit including a first resistance circuit and a first switch coupled in series in this order between a first node, which has a first potential different from a potential of the input line, and the input line; and a control circuit configured to control the first switch based on the voltage signal so as to cancel at least a part of a leakage current flowing through the integration circuit.
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