Invention Grant
- Patent Title: Extension structures in piezoelectric microelectromechanical system microphones
-
Application No.: US17810359Application Date: 2022-07-01
-
Publication No.: US11979712B2Publication Date: 2024-05-07
- Inventor: You Qian , Rakesh Kumar , Guofeng Chen
- Applicant: SKYWORKS SOLUTIONS, INC.
- Applicant Address: US CA Irvine
- Assignee: SKYWORKS SOLUTIONS, INC.
- Current Assignee: SKYWORKS SOLUTIONS, INC.
- Current Assignee Address: US CA Irvine
- Agency: Lando & Anastasi, LLP
- Main IPC: H04R17/02
- IPC: H04R17/02

Abstract:
A piezoelectric microelectromechanical system microphone comprises a frame, a film of piezoelectric material including slits defining a plurality of independently displaceable piezoelectric elements within an area defined by a perimeter of the frame, bases of the plurality of piezoelectric elements mechanically secured to the frame, tips of the plurality of piezoelectric elements being free to be displaced in a direction perpendicular to a plane defined by the frame responsive to impingement of sound waves on the plurality of piezoelectric elements, and edge extensions extending from edges of the plurality of piezoelectric elements in the direction perpendicular to the plane defined by the frame to reduce a 3 dB roll-off frequency of the piezoelectric microelectromechanical system microphone.
Public/Granted literature
- US20230007405A1 EXTENSION STRUCTURES IN PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEM MICROPHONES Public/Granted day:2023-01-05
Information query