Memory device using semiconductor element
Abstract:
An n+ layer 3a connected to a source line SL at both ends, an n+ layer 3b connected to a bit line BL, a first gate insulating layer 4a formed on a semiconductor substrate 1 existing on an insulating film 2, a gate conductor layer 16a connected to a plate line PL, a gate insulating layer 4b formed on the semiconductor substrate, and a second gate conductor layer 5b connected to a word line WL and having a work function different from a work function of the gate conductor layer 16a are disposed on the semiconductor substrate, and data hold operation of holding, near a gate insulating film, holes generated by an impact ionization phenomenon or gate-induced drain leakage current inside a channel region 12 of the semiconductor substrate 1 and data erase operation of removing the holes from inside the substrate 1 and the channel region 12 are performed by controlling voltage applied to the source line SL, the plate line PL, the word line WL, and the bit line BL.
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