Invention Grant
- Patent Title: Wide-base magnetic tunnel junction device with sidewall polymer spacer
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Application No.: US17304179Application Date: 2021-06-16
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Publication No.: US11980039B2Publication Date: 2024-05-07
- Inventor: Nathan P. Marchack , Chandrasekharan Kothandaraman , Pouya Hashemi
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent L. Jeffrey Kelly; Yuanmin Cai
- Main IPC: H10B61/00
- IPC: H10B61/00 ; H10N50/01 ; H10N50/10 ; H10N50/80

Abstract:
A semiconductor device including a second magnetic tunnel junction stack aligned above a spin conductor layer above a first magnetic junction stack, a sidewall dielectric surrounding the second magnetic tunnel junction stack, a vertical side surface of the sidewall dielectric is aligned with vertical side surfaces of the spin conductor layer and the first magnetic junction stack. A method including forming a first magnetic tunnel junction stack, a spin conductor layer and a second magnetic tunnel junction stack, patterning the second magnetic tunnel junction stack, while not patterning the spin conductor layer and the first magnetic tunnel junction stack, forming a sidewall dielectric and a polymer layer on the sidewall dielectric. A method including patterning a second magnetic tunnel junction stack, while not patterning a spin conductor layer below the second magnetic tunnel junction stack nor a first magnetic tunnel junction stack below the spin conductor layer.
Public/Granted literature
- US20220406841A1 WIDE-BASE MAGNETIC TUNNEL JUNCTION DEVICE WITH SIDEWALL POLYMER SPACER Public/Granted day:2022-12-22
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