Invention Grant
- Patent Title: Protective sealant for chalcogenide material and methods for forming the same
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Application No.: US17881285Application Date: 2022-08-04
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Publication No.: US11980108B2Publication Date: 2024-05-07
- Inventor: Farrell M. Good , Robert K. Grubbs , Gurpreet S. Lugani
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- The original application number of the division: US16731963 2019.12.31
- Main IPC: H10N70/00
- IPC: H10N70/00

Abstract:
Techniques are described to form a liner to protect a material, such as a storage element material, from damage during subsequent operations or phases of a manufacturing process. The liner may be bonded to the material (e.g., a chalcogenide material) using a strong bond or a weak bond. In some cases, a sealant material may be deposited during an etching phase of the manufacturing process to prevent subsequent etching operations from damaging a material that has just been etched.
Public/Granted literature
- US20230023105A1 PROTECTIVE SEALANT FOR CHALCOGENIDE MATERIAL AND METHODS FOR FORMING THE SAME Public/Granted day:2023-01-26
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