A semiconductor device may include a first capacitor and a second capacitor. The first capacitor may include a first lower electrode, a first upper electrode and a first dielectric layer disposed between the first lower electrode and the first upper electrode at a first height. The second capacitor may be positioned spaced apart from the first capacitor. The second capacitor may include a second lower electrode, a second upper electrode and a second dielectric layer disposed between the second lower electrode and the second upper electrode at a second height different from the first height.