Invention Grant
- Patent Title: Multiple deep trench isolation (MDTI) structure for CMOS image sensor
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Application No.: US17883660Application Date: 2022-08-09
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Publication No.: US11984465B2Publication Date: 2024-05-14
- Inventor: Wei Chuang Wu , Ching-Chun Wang , Dun-Nian Yaung , Feng-Chi Hung , Jen-Cheng Liu , Yen-Ting Chiang , Chun-Yuan Chen , Shen-Hui Hong
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N25/702 ; H04N25/704 ; H04N25/76

Abstract:
The present disclosure relates to a CMOS image sensor having a multiple deep trench isolation (MDTI) structure, and an associated method of formation. In some embodiments, the image sensor comprises a boundary deep trench isolation (BDTI) structure disposed at boundary regions of a pixel region surrounding a photodiode. The BDTI structure has a ring shape from a top view and two columns surrounding the photodiode with the first depth from a cross-sectional view. A multiple deep trench isolation (MDTI) structure is disposed at inner regions of the pixel region overlying the photodiode, the MDTI structure extending from the back-side of the substrate to a second depth within the substrate smaller than the first depth. The MDTI structure has three columns with the second depth between the two columns of the BDTI structure from the cross-sectional view. The MDTI structure is a continuous integral unit having a ring shape.
Public/Granted literature
- US20220384495A1 MULTIPLE DEEP TRENCH ISOLATION (MDTI) STRUCTURE FOR CMOS IMAGE SENSOR Public/Granted day:2022-12-01
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