Invention Grant
- Patent Title: Semiconductor device with air gap
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Application No.: US17542758Application Date: 2021-12-06
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Publication No.: US11985816B2Publication Date: 2024-05-14
- Inventor: Liang-Pin Chou
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: MUNCY, GEISSLER, OLDS & LOWE, P.C.
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L21/768

Abstract:
The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate; a drain region positioned in the substrate; a common source region positioned in the substrate and opposing to the drain region; a bit line structure including a bit line conductive layer positioned on the substrate and electrically coupled to the common source region; a cell contact positioned on the substrate, adjacent to the bit line structure, and electrically connected to the drain region; a landing pad positioned above the bit line conductive layer and electrically connected to the cell contact; and an air gap positioned between the landing pad and the bit line conductive layer.
Public/Granted literature
- US20230180462A1 SEMICONDUCTOR DEVICE WITH AIR GAP Public/Granted day:2023-06-08
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