Garnet compound, sintered body and sputtering target containing same
Abstract:
A garnet compound represented by a general formula (I):

Ln3In2Ga3-XAlXO12  (I)

(in the formula, Ln represents one or more metal elements selected from La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies an expression 0≤X
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