Invention Grant
- Patent Title: Method of manufacturing a graphene-based biological field-effect transistor
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Application No.: US17382661Application Date: 2021-07-22
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Publication No.: US11988629B2Publication Date: 2024-05-21
- Inventor: Sung H. Lim , Eric Lewis Danielson , Maurizio Tarsia , Gary Robert Larsen
- Applicant: Lyten, Inc.
- Applicant Address: US CA San Jose
- Assignee: Lyten, Inc.
- Current Assignee: Lyten, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Paradice & Li LLP
- Main IPC: H01L29/16
- IPC: H01L29/16 ; G01N27/414 ; H01L29/66

Abstract:
A method for manufacturing a biological field-effect transistor (BioFET) is disclosed. In some implementations, the method may include preparing a carbonaceous dispersion by adding a three-dimensional (3D) graphene into a solvent; depositing the carbonaceous dispersion onto a p-type silicon wafer; spin-coating a positive photoresist over the carbonaceous dispersion; forming source and drain terminals on the p-type silicon wafer, the source and drain terminals in contact with the 3D graphene of the carbonaceous dispersion; removing residual photoresist from the carbonaceous dispersion by placing the p-type silicon wafer in 1-methyl-2-pyrrolidone (NMP); and biofunctionalizing the carbonaceous dispersion with a molecular recognition element configured to alter one or more electrical properties of the Bio-FET in response to exposure of the molecular recognition element to the analyte.
Public/Granted literature
- US20210396709A1 METHOD OF MANUFACTURING A GRAPHENE-BASED BIOLOGICAL FIELD-EFFECT TRANSISTOR Public/Granted day:2021-12-23
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