- Patent Title: Slot waveguide for a phase shifter based on ferroelectric materials
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Application No.: US17557345Application Date: 2021-12-21
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Publication No.: US11988904B2Publication Date: 2024-05-21
- Inventor: Andreas Mai , Patrick Steglich , Christian Mai , Catherine Dubourdieu , Veeresh Deshpande , Dong-Jik Kim
- Applicant: IHP GmbH—Innovations for High Performance Microelectronics/ Leibniz-Institut fur Innovative Mikroel
- Applicant Address: DE Frankfurt
- Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS / LEIBNIZ-INSTITUT FÜR INNOVATIVE MIKROELEKTRONIK
- Current Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS / LEIBNIZ-INSTITUT FÜR INNOVATIVE MIKROELEKTRONIK
- Current Assignee Address: DE Frankfurt
- Agency: Ware, Fressola, Maguire & Barber LLP
- Priority: EP 216906 2020.12.23
- Main IPC: G02F1/025
- IPC: G02F1/025
Abstract:
The present invention relates to a slot waveguide formed by a vertical material stack comprising a top layer with a first refractive index, a center layer including a ferroelectric material and with a second refractive index, and a Si1-xGex pseudosubstrate layer with 0
Public/Granted literature
- US20220197066A1 SLOT WAVEGUIDE FOR A PHASE SHIFTER BASED ON FERROELECTRIC MATERIALS Public/Granted day:2022-06-23
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