Invention Grant
- Patent Title: Faraday rotators, optical isolators, driver laser arrangements and EUV radiation generation apparatus
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Application No.: US16996238Application Date: 2020-08-18
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Publication No.: US11988909B2Publication Date: 2024-05-21
- Inventor: Steffen Erhard
- Applicant: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Applicant Address: DE Ditzingen
- Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Current Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Current Assignee Address: DE Ditzingen
- Agency: Fish & Richardson P.C.
- Main IPC: G02F1/09
- IPC: G02F1/09 ; G02B1/12

Abstract:
A Faraday rotator includes: a disk-shaped magneto-optical solid-state medium, a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium, a heat sink with a support surface for the magneto-optical solid-state medium, a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium facing away from the support surface, and a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to a second impingement region at least partly overlapping with the first impingement region on the first side. An optical isolator can have at least one such Faraday rotator. A driver laser arrangement can have at least one such optical isolator. An EUV radiation generation apparatus can have such a driver laser arrangement.
Public/Granted literature
- US20200379281A1 FARADAY ROTATORS, OPTICAL ISOLATORS, DRIVER LASER ARRANGEMENTS AND EUV RADIATION GENERATION APPARATUS Public/Granted day:2020-12-03
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