Faraday rotators, optical isolators, driver laser arrangements and EUV radiation generation apparatus
Abstract:
A Faraday rotator includes: a disk-shaped magneto-optical solid-state medium, a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium, a heat sink with a support surface for the magneto-optical solid-state medium, a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium facing away from the support surface, and a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to a second impingement region at least partly overlapping with the first impingement region on the first side. An optical isolator can have at least one such Faraday rotator. A driver laser arrangement can have at least one such optical isolator. An EUV radiation generation apparatus can have such a driver laser arrangement.
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