Invention Grant
- Patent Title: Storage shelf
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Application No.: US16973448Application Date: 2019-03-22
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Publication No.: US11990356B2Publication Date: 2024-05-21
- Inventor: Tatsuo Tsubaki , Shinji Onishi
- Applicant: MURATA MACHINERY, LTD.
- Applicant Address: JP Kyoto
- Assignee: MURATA MACHINERY, LTD.
- Current Assignee: MURATA MACHINERY, LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP 18114816 2018.06.15
- International Application: PCT/JP2019/012222 2019.03.22
- International Announcement: WO2019/239672A 2019.12.19
- Date entered country: 2020-12-09
- Main IPC: H01L21/673
- IPC: H01L21/673 ; B65G1/14 ; H01L21/677

Abstract:
A storage shelf includes a body frame and a shelf plate attached to the body frame with an elastic body therebetween, the storage shelf storing thereon a FOUP including a contained object. The storage shelf includes a feed nozzle on the shelf plate to feed gas to the FOUP, and a feed tube with one end communicating with the feed nozzle and the other end communicating with a main tube connected to a feed source of the gas to be fed to the FOUP, the main tube being supported by the body frame. The feed tube has a flexible portion having flexibility at least partially between the one end and the other end.
Public/Granted literature
- US20210257239A1 STORAGE SHELF Public/Granted day:2021-08-19
Information query
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