Invention Grant
- Patent Title: Semiconductor package including under bump metallization pad
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Application No.: US17343992Application Date: 2021-06-10
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Publication No.: US11990439B2Publication Date: 2024-05-21
- Inventor: Jaeean Lee , Changeun Joo , Gyujin Choi
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Fish & Richardson P.C.
- Priority: KR 20200159622 2020.11.25
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/00 ; H01L23/31 ; H01L23/367 ; H01L23/495 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L25/065

Abstract:
A semiconductor package including a semiconductor chip; a lower redistribution layer on a lower surface of the semiconductor chip; a lower passivation layer on a lower surface of the lower redistribution layer; a UBM pad on the lower passivation layer and including an upper pad and a lower pad connected to the upper pad, the upper pad having a greater horizontal length at an upper surface thereof than a horizontal length at a lower surface thereof; a seed layer between the lower passivation layer and the UBM pad; and an external connecting terminal on a lower surface of the UBM pad, wherein the seed layer includes a first seed part covering a side surface of the upper pad, a second seed part covering a portion of the lower surface of the upper pad, and a third seed part covering a portion of a side surface of the lower pad.
Public/Granted literature
- US20220165693A1 SEMICONDUCTOR PACKAGE INCLUDING UNDER BUMP METALLIZATION PAD Public/Granted day:2022-05-26
Information query
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