Apparatus and method for semiconductor device bonding
Abstract:
An apparatus and method for semiconductor device (such as semiconductor die or die) bonding. The apparatus has a bonding assembly with a bonding head having a bonding tool for holding a semiconductor device; and a bonding head actuation mechanism for actuating the bonding tool horizontally planarly to align the semiconductor device relative to a bonding location of a substrate while the semiconductor device remains above the bonding location. The bonding assembly has a bonding assembly actuator for actuating the bonding head vertically to pick the semiconductor device and to bond the semiconductor device at the bonding location. The apparatus has a vision assembly with alignment cameras for capturing reference views of the semiconductor device and bonding location for aligning the semiconductor device relative to the bonding location, and a vision assembly actuation mechanism for actuating the alignment cameras to position the alignment cameras between the bonding tool and bonding location.
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