Invention Grant
- Patent Title: Apparatus and method for semiconductor device bonding
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Application No.: US16565589Application Date: 2019-09-10
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Publication No.: US11990445B2Publication Date: 2024-05-21
- Inventor: Amlan Sen
- Applicant: PYXIS CF PTE. LTD.
- Applicant Address: SG Singapore
- Assignee: PYXIS CF PTE. LTD.
- Current Assignee: PYXIS CF PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Nesbitt IP LLC
- Agent Daniel F. Nesbitt
- Priority: SG 201807813v 2018.09.11
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
An apparatus and method for semiconductor device (such as semiconductor die or die) bonding. The apparatus has a bonding assembly with a bonding head having a bonding tool for holding a semiconductor device; and a bonding head actuation mechanism for actuating the bonding tool horizontally planarly to align the semiconductor device relative to a bonding location of a substrate while the semiconductor device remains above the bonding location. The bonding assembly has a bonding assembly actuator for actuating the bonding head vertically to pick the semiconductor device and to bond the semiconductor device at the bonding location. The apparatus has a vision assembly with alignment cameras for capturing reference views of the semiconductor device and bonding location for aligning the semiconductor device relative to the bonding location, and a vision assembly actuation mechanism for actuating the alignment cameras to position the alignment cameras between the bonding tool and bonding location.
Public/Granted literature
- US20200083193A1 APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE BONDING Public/Granted day:2020-03-12
Information query
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