- Patent Title: Three-dimensional memory devices and fabricating methods thereof
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Application No.: US17015957Application Date: 2020-09-09
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Publication No.: US11991880B2Publication Date: 2024-05-21
- Inventor: Zhenyu Lu , Yu Ru Huang , Qian Tao , Yushi Hu , Jun Chen , Xiaowang Dai , Jifeng Zhu , Yongna Li , Lidong Song
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: CN 1710751281.8 2017.08.28
- The original application number of the division: US16126416 2018.09.10
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L21/033 ; H01L21/28 ; H01L23/532 ; H10B43/10 ; H10B43/35

Abstract:
A method for forming a 3D memory device is disclosed. The method includes: forming an alternating dielectric stack on a substrate; forming a plurality of channel holes penetrating the alternating dielectric stack; forming a channel structure in each channel hole; forming a channel column structure on the channel structure in each channel hole; trimming an upper portion of each channel column structure to form a channel plug; and forming a top selective gate cut between neighboring channel plugs.
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