Invention Grant
- Patent Title: Vertical memory device
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Application No.: US17693861Application Date: 2022-03-14
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Publication No.: US11991883B2Publication Date: 2024-05-21
- Inventor: Chang-Bum Kim , Sung-Hoon Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Fish & Richardson P.C.
- Priority: KR 20180053203 2018.05.09
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H10B43/10 ; H10B43/27 ; H10B43/30 ; H10B43/40

Abstract:
A vertical memory device includes a gate line structure including a cell region in which a vertical channel structure is formed, and a first connection region and a second connection region which are respectively arranged at first and second ends of the cell region in a first direction. Each of the first connection region and the second connection region includes a first protrusion of the first gate line and a second protrusion of the second gate line which are parallel to a top surface of the substrate and arranged as steps in a second direction perpendicular to the first direction. The first protrusion of the second connection region is arranged diagonally from the first protrusion of the first connection region with respect to a center line of the cell region which is parallel to the first direction.
Public/Granted literature
- US20220199647A1 VERTICAL MEMORY DEVICE Public/Granted day:2022-06-23
Information query
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