Invention Grant
- Patent Title: Polishing composition, polishing method, and method for producing substrate
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Application No.: US17434904Application Date: 2020-03-24
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Publication No.: US11992914B2Publication Date: 2024-05-28
- Inventor: I-Chun Chang
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Aichi
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Aichi
- Agency: Katten Muchin Rosenman LLP
- Priority: JP 19061636 2019.03.27
- International Application: PCT/JP2020/013088 2020.03.24
- International Announcement: WO2020/196542A 2020.10.01
- Date entered country: 2021-08-30
- Main IPC: B24B37/04
- IPC: B24B37/04 ; H01L21/3105 ; H01L21/321 ; H01L21/768

Abstract:
An object of the present invention is to provide a polishing composition which can make the removal rate of a metal material and the removal rate of a resin material the same or close to each other in a chemical mechanical polishing process, which can accordingly avoid or suppress the occurrence of a step difference. The polishing composition contains: abrasive grains containing silica, with at least a part of hydrogen atoms constituting a silanol group located on a surface of the silica being substituted with a cation of at least one metal atom M selected from the group consisting of aluminum, chromium, titanium, zirconium, iron, zinc, tin, scandium, and gallium; and a dispersing medium. The pH of the polishing composition is more than 2 and 7 or less.
Public/Granted literature
- US20220055180A1 POLISHING COMPOSITION, POLISHING METHOD, AND METHOD FOR PRODUCING SUBSTRATE Public/Granted day:2022-02-24
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