Invention Grant
- Patent Title: Modular-component system for gas delivery
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Application No.: US17603214Application Date: 2020-04-14
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Publication No.: US11996301B2Publication Date: 2024-05-28
- Inventor: John Folden Stumpf , Damien Long , Norman Nakashima , Karl Frederick Leeser
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Schwegman Lundberg & Woessner, P.A.
- International Application: PCT/US2020/028158 2020.04.14
- International Announcement: WO2020/214616A 2020.10.22
- Date entered country: 2021-10-12
- Main IPC: H01L21/67
- IPC: H01L21/67 ; F16K27/00

Abstract:
In one embodiment, the disclosed apparatus is at least one gas-primitive substrate for use in a gas-delivery box. Each of the at least one gas-primitive substrates has at least one location on which a gas-delivery component is to be mounted. The at least one location has at least a gas-delivery component inlet port and a gas-delivery component outlet port formed within a body of the gas-primitive substrate. At least one first pair of bore holes comprising a gas-flow path is formed on an upstream side and a downstream side, respectively, of the location of the gas-delivery component. Other apparatuses and systems are disclosed.
Public/Granted literature
- US20220199431A1 MODULAR-COMPONENT SYSTEM FOR GAS DELIVERY Public/Granted day:2022-06-23
Information query
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