Invention Grant
- Patent Title: Substrate cleaning device and substrate cleaning method
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Application No.: US18328645Application Date: 2023-06-02
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Publication No.: US11996303B2Publication Date: 2024-05-28
- Inventor: Haiyang Xu , Mitsuhiko Inaba
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP 18129086 2018.07.06
- The original application number of the division: US17489277 2021.09.29
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B1/14 ; B08B1/32 ; B24B37/04 ; B24B37/34 ; H01L21/02

Abstract:
A substrate cleaning device includes: a pressing member that cleans a substrate by contacting the substrate; a load measurement unit that measures a pressing load of the cleaning member; and a control unit that repeats an operation of comparing the measurement value of the load measurement unit with the setting load, changing the pressing amount of the cleaning member by a first movement amount so that a difference value decreases, when the difference value is larger than a first threshold value and equal to or smaller than a second threshold value, and changing the pressing amount of the cleaning member by a second movement amount larger than the first movement amount so that the difference value decreases, when the difference value is larger than the second threshold value, until the difference value becomes equal to or smaller than the first threshold value.
Public/Granted literature
- US20230326770A1 SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD Public/Granted day:2023-10-12
Information query
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