Invention Grant
- Patent Title: Chiplet interposer
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Application No.: US17339745Application Date: 2021-06-04
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Publication No.: US11996371B2Publication Date: 2024-05-28
- Inventor: Shang-Yun Hou , Weiming Chris Chen , Kuo-Chiang Ting , Hsien-Pin Hu , Wen-Chih Chiou , Chen-Hua Yu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L21/48 ; H01L21/683 ; H01L23/00 ; H01L23/31 ; H01L23/538 ; H01L25/00 ; H01L25/065

Abstract:
Embodiments include packages and methods for forming packages which include interposers having a substrate made of a dielectric material. The interposers may also include a redistribution structure over the substrate which includes metallization patterns which are stitched together in a patterning process which includes multiple lateral overlapping patterning exposures.
Public/Granted literature
- US20220262742A1 CHIPLET INTERPOSER Public/Granted day:2022-08-18
Information query
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