Invention Grant
- Patent Title: Electronic device
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Application No.: US17028627Application Date: 2020-09-22
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Publication No.: US11996422B2Publication Date: 2024-05-28
- Inventor: Masayuki Takase , Shunsuke Isono , Yuuko Tomekawa
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Rimon P.C.
- Priority: JP 18072409 2018.04.04
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An electronic device includes: a capacitor; an insulating layer; at feast one trench provided in the insulating layer; and a first conductive plug, at least part of which is surrounded by the insulating layer. The capacitor includes: a first lower electrode provided along an inner wall of the at least one trench, a dielectric layer provided on the first lower electrode, and an upper electrode provided on the dielectric layer. At least part of the first conductive plug is positioned between an upper surface of the insulating layer and a lowermost portion of the at least one trench.
Public/Granted literature
- US20210013253A1 ELECTRONIC DEVICE Public/Granted day:2021-01-14
Information query
IPC分类: