Image correction method, imaging device, and inspection device
Abstract:
An image correction method for correcting multiple original images captured under illumination by multiple different light source colors in generating a composite image by superposing the original images, includes obtaining a correction amount for correcting a position of a fiducial mark recognized from a reference image of a specific light source color in reference images of the multiple different light source colors; obtaining correction amounts for correcting positions of the fiducial mark recognized from the reference images of other light source colors than a specific light source color to the reference position in the reference image of the specific light source color; and when the original images are captured, correcting collectively distortion aberration and chromatic aberration of the original images of the multiple different light source colors using the correction amounts associated with the multiple different light source colors.
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