Invention Grant
- Patent Title: Back-end-of-line selector for memory device
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Application No.: US17109427Application Date: 2020-12-02
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Publication No.: US11997855B2Publication Date: 2024-05-28
- Inventor: Bo-Feng Young , Sheng-Chen Wang , Sai-Hooi Yeong , Yu-Ming Lin , Mauricio Manfrini , Han-Jong Chia
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H10B63/00
- IPC: H10B63/00 ; H01L29/24 ; H01L29/66 ; H01L29/786 ; H10B61/00

Abstract:
The present disclosure, in some embodiments, relates to a memory device. In some embodiments, the memory device has a substrate and a lower interconnect metal line disposed over the substrate. The memory device also has a selector channel disposed over the lower interconnect metal line and a selector gate electrode wrapping around a sidewall of the selector channel and separating from the selector channel by a selector gate dielectric. The memory device also has a memory cell disposed over and electrically connected to the selector channel and an upper interconnect metal line disposed over the memory cell. By placing the selector within the back-end interconnect structure, front-end space is saved, and more integration flexibility is provided.
Public/Granted literature
- US20210375990A1 BACK-END-OF-LINE SELECTOR FOR MEMORY DEVICE Public/Granted day:2021-12-02
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